Equipment Details

Item number: 8126

Type: Metrology

Model: RS75

Manufacturer: KLA-Tencor

KLA Tencor RS75

  • Sheet resistance
  • Set for 8" wafer
  • Vintage: 2000
  • 4 point probe system
  • One second per site measurement speed
  • 49 site contour map
  • Still running in fab

Contact us today!