©2006 Advance ProcessTechnology. All Rights Reserved.
APTAdvance Process Technology, Inc.  
  Home Browse Equipment Services Contact Us

IPEC/SpeedFam 776 Dry-in Dry-out CMP (S/N: 776-018)

Currently Configured for 200mm Wafers
Original Ship Date: December, 1997
Previously Used for Oxide Polish
Three Cassette Input Station
Integrated 7700 Cleaning Station
o Equip Robot with Wafer Sensor
4 Mechanical polishing heads with Advanced Pad Motion
2 Bladder Style Diamond Pad Conditioners
Slurry Flow Monitor Kit; NT Flow Meters
Slurry Delivery Pumps
o 17-21 Input and Output
o Upgraded to New Gray Quick Disconnect
Jacking Towers Upgraded to Hex Head Bolts
Base Upgraded to New Style Leak Detectors
Plumbing Utilizes the Ultra Pure (Flare) Fittings
Upper and Lower Pneumatics Utilize Swage Lock Fittings in all Applicable Areas
SECS/GEM Integration
Electrical Requirements: 208V, 60Hz, 5 Phase