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Applied Materials P5000 (S/N: 5988)

  • 150mm wafer size
  • Process capability: 30pph
  • Chamber 1: Oxide: LH DryVAC 100S, RUVAC 250, ENI 12B-1250W
  • Chamber 2: Oxide: LH DryVAC 100S, RU VAC 250, ENI 12B-1250W
  • Chamber 3: Oxide: LH DryVAC 100S, RUVAC 250
  • Controller type: PC
  • S/W Rev.: ROSS 4.8
  • Process Gases: TEOS/O2?C3F8
  • External cooling: Water cooled