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Novellus C2 - Sequel CVD (S/N:00-23-C59244)

  • C-2 Dual Sequel Express (include ILDS)
  • Vintage: 2000
  • 200mm wafer
  • CE marked
  • S/W: V4.80B22
  • MAG 7 Robot
  • Heated Pressure package
  • New shower head
  • Signal tower
  •  Heated manometer
  • Temp controller
  • Dual wavelength endpoint detector
  • RF isolated TC
  • AE RF match
  • Bottom Feed facilities
  • 2 AE high freq. RF generators
  • 2 AE low freq. RF generators
  • Area 7800 MFC
  • TEOS/ILDS gas