Ion Implantation

NV GSD200HE injector system enhanced source w/ dual vaporizers
Bypass valves and Nitrogen purge
3-Axis extraction electrode
10-100 KeV single extraction
Triple indexed mass analysis magnet and p/s
Injector flag faraday
GSD/HE linear accelerator and final energy magnet system
13.56MHz p/s
10 each high energy resonator cavities and electrodes
12 each quadrupole lens assy. And p/s
GSD end station w/ four cassette capability
Automatic notch alignment capability w/ buffer cassette
Integrated dummy wafer fill-in capacity
In-air, in-vacuum high throughput wafer handling system
Class 1, ULPA filtered wafer handling aree
Sun SPARC station
Seiko 1000 l/s turbo pump
CTI cryo pumps w/fast regen
Vintage Jan 1997
For 200mm wafer size