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Varian E220HP Medium Current Implanter (S/N: 037094)

  • S/W Ver.: V11.05.08
  • 2 loader
  • Still under OEM service contract
  • Base Varian E220HP sysem
  • 200mm cooled rotating platen
  • High voltage probe
  • Secs II Host communication
  • Variable delay water interlock
  • 0.01 UM N2 filter w/ Stainless steel tubing
  • Graphite componets
  • Dual vaporizer and 4-bottle gas
  • Seiko Seiki turbo pumps