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Ion Implantation
Item Manufacturer Model Type Status
Applied Materials 9500 High Current Ion Implanter Active
Axelis/Eaton GSD200E High Current Ion Implanter Active
Axelis/Eaton GSD200E High Current Ion Implanter Active
Axelis/Eaton GSD200HE High Current Ion Implanter Active
Axelis/Eaton GSD200E2 High Current Ion Implanter Active
4036
 Axelis/Eaton NV6200A Medium Current Ion Implanter Active
4037
 Axelis/Eaton NV6200AV Medium Current Ion Implanter Active
Axelis/Eaton NV6200AV Medium Current Ion Implanter Active
4039
 Eaton NV10-160 High Current Ion Implanter Active
4040
 Eaton NV10-80 Medium Current Ion Implanter Active
Varian E220HP Medium Current Ion Implanter Active
Varian E1000 High Current Ion Implanter Active
Varian E500HP Medium Current Ion Implanter Active