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Metrology Equipment
Item Manufacturer Model Type Status
4081
 HItachi S-8820 CD-SEM Active
4082
 SELA MC-100 Micro Cleaving Sold
4083
 FSI PR Track Polaris Active
4084
 KLA Tencor 1050 Film Thinkness Measurement Active
4085
 KLA Tencor RS55 Resistance Mapping Active
4086
 Leica 200 Microscope Active
4087
 KLA Tencor Surface Scan6200 Surface Analyzer Active
4088
 KLA Tencor 2132 Wafer Defect Inspection Active
4089
 Leica INS2000 Review Station Active
4181
 KLA ASET F5 File Thinkness Measurement Sold
4182
 KLA Tencor ASET F5X File Thinkness Measurement Sold
4183
 Prometrix UV1280SE Metrology Sold
4184
 Prometrix UV1280SE Metrology Sold