APTAdvance Process Technology, Inc. |
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Item |
Manufacturer |
Model |
Type |
Status |
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HItachi |
S-8820 |
CD-SEM |
Active |
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SELA |
MC-100 |
Micro Cleaving |
Sold |
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FSI |
PR Track |
Polaris |
Active |
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KLA Tencor |
1050 |
Film Thinkness Measurement |
Active |
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KLA Tencor |
RS55 |
Resistance Mapping |
Active |
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Leica |
200 |
Microscope |
Active |
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KLA Tencor |
Surface Scan6200 |
Surface Analyzer |
Active |
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KLA Tencor |
2132 |
Wafer Defect Inspection |
Active |
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Leica |
INS2000 |
Review Station |
Active |
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KLA |
ASET F5 |
File Thinkness Measurement |
Sold |
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KLA Tencor |
ASET F5X |
File Thinkness Measurement |
Sold |
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Prometrix |
UV1280SE |
Metrology |
Sold |
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Prometrix |
UV1280SE |
Metrology |
Sold |
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