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AST SHS 100MA (S/N: 96080276)

Single wafer process for 2 to 5 substrates
Manual load
400V / 50Hz
Three channel gas box
o Currently configured for two gasses
Brooks 5964 MFCs
o Oxygen
o Nitrogen
DOS Based
o S/W version 5.5
Datalog function present
No SECS/GEM interface