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Vertical Diffusion Furnaces TEL Alpha - 81- ZV

  • Process capability: SiN
  • Wafer size: 200mm
  • Controller model: TS4000
  • Number of control zone: 5
  • Process gases: N2, N2O, DCS, NH3
  • CE mark: Yes
  • Accessories: CVD system, loadsize 100, VMU heater