Equipment Details

Item number: 8005

Type: Lithography

Model: TwinScan XT1900Gi

Manufacturer: ASML

ASML TwinScan XT1900Gi Immersion Scanner

  • Currently still running online
  • Vintage: 2008
  • Lens data
    • SAMOS: 0.26
    • LUSL:0.58
    • RMS Spherical: 0..87
    • RMS Coma: 0.52
    • RMS Astigmatism: 0.41
    • RMS 3-foil: 0.6
    • RMS Z5-Z37: 1.36
    • NCE: 3.2
    • IPO: 4.1
    • AST: 3

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