Equipment Details

Item number: 8009

Type: Lithography

Model: Lithius

Manufacturer: TEL

TEL Lithius Coater Developer Track

Multi block system
3 BARC coater
2 Resist coater
5 developer
3 adhesion unit
6 CLHP
18 CPHP
4 LHP
11 HCP
2 WCPL
2 WEE
6 CWH

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