Equipment Details

Item number: 8013

Type: Metrology - CD SEM

Model: CG 4100

Manufacturer: Hitachi

Hitachi CG-4100 CD SEM

  • Set for 12" wafer
  • SW Ver: 35.47
  • Resolution: 1.8nm
  • Throughput: 42wph
  • Stage Accuracy: +/- 1um

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