Equipment Details

Item number: 8101

Type: Metrology - CD SEM

Model: S-9220

Manufacturer: Hitachi

Hitachi CD SEM S-9220

Set for 8" wafer
Vintage: 2001
Image resolution: 3nm at 0.8kv accelerating voltage
Accelerating voltage rage: 0.5kv to 1.3kv
Magification Range: 1 kx to 300 kx
Measurement range: 0.1 to 2.0
Reproducibility: 3nM
Throughput: 45 wafer/hour
Still running in fab

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