Equipment Details

Item number: 8182

Type: Lithography

Model: NSR-S207D

Manufacturer: Nikon

Nikon NSR-S207D DUV Scanner

Currently set for 12" wafer
248nm wavelength
Resolution <=130nm
NA: 0.82
Reduction ratio: 1:4
Exposure field: 26 x 33mm
Alignment accuracy: <=10nm
Throughput: >=147 wph (300mm wafer, 76 shots)

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