Equipment Details

Item number: 8183

Type: Lithography

Model: NSR-2205i12D

Manufacturer: Nikon

Nikon NSR-2205i12D

Currently set for 8" wafer
248nm wavelength
Resolution <=350nm
NA: 0.63
Reduction ratio: 1:5
Exposure field: 22mm square to 17.9 x 25.2mm
Alignment accuracy: <=55nm

Contact us today!