Equipment Details

Item number: 8184

Type: Lithography

Model: NSR-2205i12D

Manufacturer: Nikon

Nikon NSR-2205i12D

Currently set for 8" wafer
248nm wavelength
Resolution <=350nm
NA: 0.63
Reduction ratio: 1:5
Exposure field: 22mm sqare to 17.9 x 25.2 (6" reticle)
Alignment accuracy: <=55nm

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