Equipment Details

Item number: 8185

Type: Lithography

Model: NSR-2205i14E2

Manufacturer: Nikon

Nikon NSR-2205i14E2

Currently set for 8" wafer
248nm wavelength
Resolution <=350nm
NA: 0.63
Reduction ratio: 1:5
Exposure field: 22mm square to 17.9 x 25.2mm
Alignment accuracy: <=40nm
Throughput: 103 wafer (200mm wafer)

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