Equipment Details
Item number: 8010
Type: Lithography
Model: Lithius
Manufacturer: TEL
TEL Lithius Coater Developer Track- KrF Track
- Multi block system
- 2 BARC coater
- 3 Resist coater
- 5 developer
- 4 CWH
- 2 HCP
- 8 TRS
- 7 WCPL
- 1 ADH
- 3 CLHP
- 5 CPHP
- 14 LHP
- 5 WEE
- 1 SBU
- 2 THS
- 1 RSM
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