Equipment Details

Item number: 8180

Type: Lithography

Model: TwinScan XT1950Gi

Manufacturer: ASML

ASML TwinScan XT1950Gi Scaner

  • Currently set for 12"
  • Cymer XLA360 laser
  • Still running in Fab
  • 193nm immersion scanner
  • 1.35NA

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