Equipment Details

Item number: 8001

Type: Lithography

Model: TwinScan XT1700Fi

Manufacturer: ASML

ASML TwinScan XT1700Fi Immersion Scaner: 

This is a parts tool, including:

  • Reticle stage
  • Reticle handler
  • Wafer handler
  • Lens unit
  • Illuminator rack
  • Beam turning bottom module
  • External interface module
  • Electric cabinet
  • Air Control cabinet
  • LCWC
  • MCWC
  • WSRC
  • WICC
  • WISC
  • All the covering panels

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